
Proceedings Paper
VCSEL arrays with integrated opticsFormat | Member Price | Non-Member Price |
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Paper Abstract
Systems with arrays of VCSELs can realize multi kilowatt output power. The inherent simplicity of VCSELs enables a
performance and cost breakthrough in solutions for thermal processing and the pumping of solid state lasers. The use of
an array of micro-optics i.e. one micro-lens per VCSEL enables multiple advantages: firstly it can function as a
collimating lens in order to realize a brightness of an array which is similar to the brightness of a single VCSEL.
Secondly the micro-lens can be part of an imaging system for tailored intensity distributions. Last but not least the microlens
with moderate feedback into the VCSEL can help to select laser modes in order to increase brightness and mode
stability. Wafer-level integrated micro-optics allow keeping the VCSEL advantage of realizing complete and operational
lasers on wafer level including the micro-optics. This paper presents our approach to bond a 3” GaAs wafer with a
micro-optics wafer of the same size. The type of glass used for the optics wafer has been selected to match the
coefficient of thermal expansion of GaAs and is suitable for hot pressing of the lens structures. An alignment strategy
with corresponding markers on both wafers is used to allow the alignment on a standard mask aligner thus realizing
many thousand lens adjustments in a single process step. The technology can be combined with VCSEL wafers with
thinned substrate as well as with complete substrate removal. The basic technology and illustrative prototype systems are
described here.
Paper Details
Date Published: 13 March 2013
PDF: 10 pages
Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390M (13 March 2013); doi: 10.1117/12.2000373
Published in SPIE Proceedings Vol. 8639:
Vertical-Cavity Surface-Emitting Lasers XVII
Kent D. Choquette; James K. Guenter, Editor(s)
PDF: 10 pages
Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390M (13 March 2013); doi: 10.1117/12.2000373
Show Author Affiliations
Holger Moench, Philips Technologie GmbH (Germany)
Stephan Gronenborn, Philips Technologie GmbH (Germany)
Xi Gu, Philips Lighting B.V. (Netherlands)
Johanna Kolb, Philips Technologie GmbH (Germany)
Stephan Gronenborn, Philips Technologie GmbH (Germany)
Xi Gu, Philips Lighting B.V. (Netherlands)
Johanna Kolb, Philips Technologie GmbH (Germany)
Michael Miller, Philips Technologie GmbH U-L-M Photonics (Germany)
Pavel Pekarski, Philips Technologie GmbH (Germany)
Ulrich Weichmann, Philips Technologie GmbH (Germany)
Pavel Pekarski, Philips Technologie GmbH (Germany)
Ulrich Weichmann, Philips Technologie GmbH (Germany)
Published in SPIE Proceedings Vol. 8639:
Vertical-Cavity Surface-Emitting Lasers XVII
Kent D. Choquette; James K. Guenter, Editor(s)
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