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Proceedings Paper

Method of oblique-incidence interferogram "sewing" by three base points
Author(s): Alexander G. Seregin; Il'ya P. Agurok; Galina N. Zvereva
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Paper Abstract

Interferometric flatness testing of a large surface of 500 mm plus in diameter appears to be a complex problem which can be solved, in particular, by means of the oblique-incidence interferometer. The possibility of use of dumping least square method is considered in this paper. This method criteria are square sum minima both for wave front distortion function deviation and for mirror mounting errors in the three base points. The mathematical model has proved that the method proposed provides the original wave front reconstruction accuracy 2.5 ... 5 times better than by means of the former method depending on points number on a subaperture.

Paper Details

Date Published: 12 December 1994
PDF: 10 pages
Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994);
Show Author Affiliations
Alexander G. Seregin, S.I. Vavilov State Optical Institute (Russia)
Il'ya P. Agurok, Institute of Fine Mechanics and Optics (Russia)
Galina N. Zvereva, S.I. Vavilov State Optical Institute (Russia)

Published in SPIE Proceedings Vol. 2340:
Interferometry '94: New Techniques and Analysis in Optical Measurements
Malgorzata Kujawinska; Krzysztof Patorski, Editor(s)

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