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Proceedings Paper

Distortion testing of interferometer for flatness standard measurement
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Paper Abstract

The method for interferometer quality testing and calibration is described. The theoretical analysis and measurement results of the Fizeau interferometer errors are presented and discussed.

Paper Details

Date Published: 12 December 1994
PDF: 4 pages
Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195926
Show Author Affiliations
Leszek A. Salbut, Warsaw Univ. of Technology (Poland)
Romulad Jozwicki, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 2340:
Interferometry '94: New Techniques and Analysis in Optical Measurements
Malgorzata Kujawinska; Krzysztof Patorski, Editor(s)

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