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Proceedings Paper

Absolute interferometric testing of cylindraical surfaces
Author(s): Thomas Bluemel; Karl-Edmund Elssner; Ricarda Kafka; Guenter Schulz; Andreas Vogel
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Paper Abstract

Based on our experiences of absolute testing of flats and spherical surfaces we are developing methods for absolute testing of cylindrical surfaces. Three methods are presented and compared with each other. Method I determines the absolute deviations of three cylindrical surfaces from a mathematical cylindrical surface by five measurements. Method II calibrates the interferometer so that afterwards it can be used for absolute testing. Method III determines the absolute deviations of one single cylindrical surface by using two known flats.

Paper Details

Date Published: 12 December 1994
PDF: 8 pages
Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195918
Show Author Affiliations
Thomas Bluemel, Berliner Institut fuer Optik GmbH (Germany)
Karl-Edmund Elssner, Berliner Institut fuer Optik GmbH (Germany)
Ricarda Kafka, Berliner Institut fuer Optik GmbH (Germany)
Guenter Schulz, Berliner Institut fuer Optik GmbH (Germany)
Andreas Vogel, Berliner Institut fuer Optik GmbH (Germany)


Published in SPIE Proceedings Vol. 2340:
Interferometry '94: New Techniques and Analysis in Optical Measurements
Malgorzata Kujawinska; Krzysztof Patorski, Editor(s)

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