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Proceedings Paper

Mask making: today's enabling technology
Author(s): Stephen E. Cooper
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Paper Abstract

Not since the late 1970s has the potential existed for maskmakers to provide such significant value to the device manufacturer. This paper addresses this emerging opportunity and the challenges it represents. In addition to opportunities, we look at possible setbacks as the industry returns from what has been accurately described as the seven-year vacation.

Paper Details

Date Published: 7 December 1994
PDF: 5 pages
Proc. SPIE 2322, 14th Annual BACUS Symposium on Photomask Technology and Management, (7 December 1994); doi: 10.1117/12.195804
Show Author Affiliations
Stephen E. Cooper, Etec Systems, Inc. (United States)


Published in SPIE Proceedings Vol. 2322:
14th Annual BACUS Symposium on Photomask Technology and Management
William L. Brodsky; Gilbert V. Shelden, Editor(s)

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