Share Email Print

Proceedings Paper

Design of an EUV spectrometer with stigmatic image focusing using spherical varied line-space gratings
Author(s): Tatsuo Harada; Hideo Sakuma; Toshiaki Kita; Masato Nakamura
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A method of designing spectrometers having stigmatic image focusing properties by using spherical varied line-space (SVLS) grating is developed and is compared with toroidal uniform line-space (TULS) grating design. Helium emission sensors using concave grating spectrometers are designed to detect 30.4 nm and 58.4 nm EUV emissions. The SVLS design is found to be superior to the TULS design not only theoretically in stigmatic image focusing properties, but also practically in the ease of fabrication.

Paper Details

Date Published: 7 November 1994
PDF: 9 pages
Proc. SPIE 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry, (7 November 1994); doi: 10.1117/12.193186
Show Author Affiliations
Tatsuo Harada, Tokyo Metropolitan Univ. (Japan)
Hideo Sakuma, Tokyo Metropolitan Univ. (Japan)
Toshiaki Kita, Hitachi, Ltd. (Japan)
Masato Nakamura, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 2283:
X-Ray and Ultraviolet Spectroscopy and Polarimetry
Silvano Fineschi, Editor(s)

© SPIE. Terms of Use
Back to Top