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Proceedings Paper

Soft x-ray detection efficiency of large-area avalanche photodiodes
Author(s): Eric M. Gullikson; Ernesto V. Gramsch; Marek Szawlowski
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Paper Abstract

The efficiency of beveled edge type avalanche photodiodes has been determined for soft x rays in the range 50 eV to 300 eV. An efficiency of over 80% is measured for energies below the Si L absorption edge at 100 eV. The measured efficiency is described by a model which accounts for absorption in an oxide overlayer and recombination at the front surface of the diode. These results are very encouraging for soft x-ray/EUV applications involving both laser-produced plasma sources and synchrotron radiation.

Paper Details

Date Published: 7 November 1994
PDF: 8 pages
Proc. SPIE 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry, (7 November 1994); doi: 10.1117/12.193184
Show Author Affiliations
Eric M. Gullikson, Lawrence Berkeley Lab. (United States)
Ernesto V. Gramsch, Advanced Photonix, Inc. (Chile)
Marek Szawlowski, Advanced Photonix, Inc. (United States)


Published in SPIE Proceedings Vol. 2283:
X-Ray and Ultraviolet Spectroscopy and Polarimetry
Silvano Fineschi, Editor(s)

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