Various multilayers have been fabricated and analyzed in our laboratory over the past six years. We report effects of aging on the reflectivities of these multilayers. Several mechanisms can cause changes in multilayer performance: surface contamination, inter-layer diffusion, oxidation. We seek to study these mechanisms by modeling the measured performance with a multilayer computational code. A majority of our multilayers are Molybdenum-Silicon structures. We also have measurements on several Tungsten-Carbon multilayers, in which variations in effective 2d spacing are more readily determined because of their narrow passbands.

Date Published: 11 November 1994
PDF: 7 pages
Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193137

Published in SPIE Proceedings Vol. 2279:
Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics
Richard B. Hoover; Arthur B. C. Walker Jr., Editor(s)