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Proceedings Paper

Optical behavior determination of thin film and bulk materials in the x-ray region
Author(s): Michele M. Wilson; Muamer Zukic; Douglas G. Torr; Alphonsus John Fennelly; Edward L. Fry
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Paper Abstract

Optical constant determination of thin films is critical to the design of x-ray multilayers. In the x-ray region, surface roughness, interfacial roughness, interdiffusion, volume anisotropics, etc. all act to reduce the reflection. A method is described to include all imperfections that make a real film different from an ideal film into the `optical behavior' values for each individual layer and the multilayer as a whole. These `optical behavior' values can then be used to accurately predict the performance of the multilayer.

Paper Details

Date Published: 11 November 1994
PDF: 12 pages
Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193131
Show Author Affiliations
Michele M. Wilson, Advanced Optical Systems (United States)
Muamer Zukic, Univ. of Alabama in Huntsville (United States)
Douglas G. Torr, Univ. of Alabama in Huntsville (United States)
Alphonsus John Fennelly, Sentel Corp. (United States)
Edward L. Fry, Sentel Corp. (United States)

Published in SPIE Proceedings Vol. 2279:
Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics
Richard B. Hoover; Arthur B. C. Walker Jr., Editor(s)

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