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Proceedings Paper

Ion-assisted deposition of nontoxic coatings for high-power CO2 laser optics
Author(s): A. Schnellbuegel; Harro Hagedorn; Rainer Anton
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Paper Abstract

Rare earth fluorides have been investigated as possible coating materials for carbon dioxide laser optic components. AR and PR coatings on ZnSe substrates were produced by means of ion assisted deposition (IAD) of YF3 and YbF3. Optics with total absorption of about 0.1% and with damage thresholds of up to 30 J/cm2 were produced. Effects of IAD on stoichiometry and chemical state of the rare earth ions have been examined by x-ray photoelectron spectroscopy (XPS). In-situ XPS revealed that ion bombardment, as used in IAD, and sputter cleaning result in fluorine deficient films. Oxygen incorporation during preparation could be kept below 1 - 5at%.

Paper Details

Date Published: 4 November 1994
PDF: 10 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192160
Show Author Affiliations
A. Schnellbuegel, Univ. Hamburg (Germany)
Harro Hagedorn, Univ. Hamburg (Germany)
Rainer Anton, Univ. Hamburg (Germany)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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