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Proceedings Paper

Laser conditioning of optical coatings: some issues in the characterization by atomic force microscopy
Author(s): Anne Fornier; C. Cordillot; Dominique Ausserre; F. Paris
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Paper Abstract

We have studied the changes of dielectric optical coatings after laser conditioning using atomic force microscopy (AFM). Laser conditioning is the process which consists of illuminating a film by a laser below damage threshold in order to increase this threshold value. This method is implemented for optics used in high fluence laser beam such as Nd-glass lasers (1064 nm, 3 ns pulse length). We have studied e-beam evaporation deposited highly reflective multilayer ZrO2/SiO2 mirrors, and also single layers of SiO2, HfO2 and ZrO2. We have observed the modification of the surface after laser conditioning using the AFM. We find that this process results in localized minimization or elimination of defects (nodules, craters, etc...). Furthermore, the origin of the increase in the size of the hillocks observed after laser conditioning and previously reported by other groups, has been experimentally identified as an instrumental artifact.

Paper Details

Date Published: 4 November 1994
PDF: 11 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192158
Show Author Affiliations
Anne Fornier, CEA-Ctr. d'Etudes de Limeil Valenton (France)
C. Cordillot, CEA-Ctr. d'Etudes de Limeil Valenton (France)
Dominique Ausserre, Univ. du Maine (France)
F. Paris, Ctr. de Transfert de Technologie du Mans (France)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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