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Proceedings Paper

Surface topography restitution for rough thin film deposits
Author(s): Antoine Llebaria; F. Abdellani; Monique Rasigni; Georges Rasigni
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Paper Abstract

A classic method for studying surface roughness of thin films that uses a microdensitometer analysis of electron micrographies of surface replica is revised and some defects are revealed. Two new methods are proposed. The first is based on multiresolution analysis, the second implements Wiener filtering by 2D Fourier Transform. The results are used to check the surface normality by means of statistical tests.

Paper Details

Date Published: 4 November 1994
PDF: 12 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192141
Show Author Affiliations
Antoine Llebaria, Lab. d'Astronomie Spatiale (France)
F. Abdellani, Dept. de Physique des Interactions Photons-Matiere (France)
Monique Rasigni, Dept. de Physique des Interactions Photons-Matiere (France)
Georges Rasigni, Dept. de Physique des Interactions Photons-Matiere (France)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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