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Proceedings Paper

Overlapping of roughness spectra measured in macroscopic (optical) and microscopic (AFM) bandwIDths
Author(s): Claude Amra; Carole Deumie; Didier Torricini; Pierre J. Roche; Raymond Galindo; P. Dumas; F. Salvan
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Paper Abstract

Light scattering and Atomic Force Microscopy (AFM) are used together to analyze surface roughness in a very wide frequency bandwidth, extending from macroscopic (optical) to microscopic (AFM) scales. The two techniques are shown to be in large agreement since the roughness spectra overlap at intersection of bandwidths. A particular behavior of roughness is emphasized that permits to predict scattering at very short wavelengths. Thin film materials obtained by different techniques (IAD, Ion Plating, EB) are also investigated via a comparison of roughness spectra measured before and after coating in all bandwidths.

Paper Details

Date Published: 4 November 1994
PDF: 17 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192140
Show Author Affiliations
Claude Amra, ENSPM (France)
Carole Deumie, ENSPM (France)
Didier Torricini, ENSPM (France)
Pierre J. Roche, ENSPM (France)
Raymond Galindo, ENSPM (France)
P. Dumas, Faculte des Sciences de Luminy (France)
F. Salvan, Faculte des Sciences de Luminy (France)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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