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Proceedings Paper

Secondary neutral mass spectrometry (SNMS) depth profile analysis of optical coatings
Author(s): Peter Weissbrodt; Dirk Mademann; Erich J. Hacker
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Paper Abstract

Electron-gas SNMS offers favorable properties, often useful or even necessary for the depth profiling of optical coatings. A short introduction into this method, examples of SNMS depth profile analysis in the fields of composite oxide layers, control of complex thin film components, damage of coatings and characterization of multilayers for soft X-ray optics, as well as a report of ongoing developments are given, demonstrating the performance, the limits and the future potential of the SNMS depth profile analysis.

Paper Details

Date Published: 4 November 1994
PDF: 10 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192139
Show Author Affiliations
Peter Weissbrodt, JENOPTIK Technologie GmbH (Germany)
Dirk Mademann, JENOPTIK Technologie GmbH (Germany)
Erich J. Hacker, JENOPTIK Technologie GmbH (Germany)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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