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Proceedings Paper

Direct optical monitoring instrument with a double detection system for the control of multilayer systems from the visible to the near infrared
Author(s): Markus Tilsch; Volker Scheuer; Josef Staub; Theo T. Tschudi
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Paper Abstract

An instrument for direct optical monitoring of film grown during deposition was developed. The transmittances of the original substrates, rotating for homogeneity reasons, are measured. The instrument is equipped with a double detection system including a linear photodiode array and a photomultiplier tube, working at different variable wavelengths. The design of the instrument, the main features and first produced optical devices are described.

Paper Details

Date Published: 4 November 1994
PDF: 9 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192114
Show Author Affiliations
Markus Tilsch, Technische Hochschule Darmstadt (United States)
Volker Scheuer, Technische Hochschule Darmstadt (Germany)
Josef Staub, Technische Hochschule Darmstadt (Germany)
Theo T. Tschudi, Technische Hochschule Darmstadt (Germany)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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