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Proceedings Paper

Low-loss ion beam sputtered coatings in the nineties
Author(s): David T. Wei
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Paper Abstract

Dielectric coatings of ultra-low optical loss has been improved by using ion beam sputtering for more than three orders of magnitude within the last two decades. Its fabrication method and kinetic mechanisms are reviewed, and a physical model for the sputtering deposition is described. The manufacture trends and application areas in the 1990s are analyzed and some basic questions are answered.

Paper Details

Date Published: 4 November 1994
PDF: 12 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192110
Show Author Affiliations
David T. Wei, Xerox Corp. (United States)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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