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Proceedings Paper

Design of an integrated scatter instrument for measuring scatter losses of superpolished optical surfaces, application to surface characterization of transparent fused quartz substrates
Author(s): Oliver Kienzle; Volker Scheuer; Josef Staub; Theo T. Tschudi
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Paper Abstract

In this presentation the design concept of an instrument for measuring total integrated scattering with a resolution limit of 0.1 ppm will be described. Furthermore the result of a theoretical model will be given which includes the scattering contributions from the front and the back surface of a transparent substrate. With the result obtained, surface roughness and power spectral density functions of the individual substrate surfaces can be calculated from scatter measurements. The improved measurement facility of the instrument in conjunction with the developed theoretical model allows surface characterization of transparent substrates in case of negligible volume scattering of the bulk material. Measurement results will be presented verifying the results of the model and showing the instrument's ability to characterize polishing quality of transparent substrates. Scatter losses as low as 0.6 ppm corresponding to 1 angstrom rms surface roughness have been determined measuring a `superpolished' transparent fused quartz substrate.

Paper Details

Date Published: 4 November 1994
PDF: 12 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192058
Show Author Affiliations
Oliver Kienzle, Technische Hochschule Darmstadt (Germany)
Volker Scheuer, Technische Hochschule Darmstadt (Germany)
Josef Staub, Technische Hochschule Darmstadt (Germany)
Theo T. Tschudi, Technische Hochschule Darmstadt (Germany)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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