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Proceedings Paper

New algorithm for single wavelength ellipsometry of samples consisting of two absorbing layers
Author(s): Salvador Bosch; Santiago Vallmitjana; Francisco Monzonis
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Paper Abstract

The generalization of a recent numerical inversion procedure for the analysis of ellipsometric data of double layer samples is described. Within this generalization, data reduction for any double absorbing layer configuration is easily accomplished. Starting from a ((Delta) , (Psi) ) measurement of a single incidence angle and single wavelength ellipsometer, our method will allow finding any two configuration parameters, provided one of them is a thickness. This reduces the constraints of previous methods, leading also to a simple 1D root- finding numerical scheme. Useful graphical procedures for the analysis of double-layer ellipsometric results are easily devised.

Paper Details

Date Published: 4 November 1994
PDF: 10 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192055
Show Author Affiliations
Salvador Bosch, Univ. de Barcelona (Spain)
Santiago Vallmitjana, Univ. de Barcelona (Spain)
Francisco Monzonis, Univ. de Barcelona (Spain)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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