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Proceedings Paper

Interface and volume inhomegeneities in optical thin films investigated by light scattering methods
Author(s): Angela Duparre; Stefan Gliech; Karl Hehl; Stephan Pichlmaier; Uwe Schuhmann
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Paper Abstract

A theoretical formalism and experimental methods are presented, which enable statistical fluctuations of the films bulk and interface roughness properties to be estimated from volume scattering and roughness scattering, respectively. The theoretical model is implemented in a numerical algorithm that allows one to optimize experimental strategies and to determine morphological parameters from measured scattering curves. Angle resolved scattering (ARS) measurements are performed on MgF2 films on glass substrates while varying the illumination and observation parameters. Atomic force microscopy (AFM) provides helpful additional information on the surface morphology.

Paper Details

Date Published: 4 November 1994
PDF: 8 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192050
Show Author Affiliations
Angela Duparre, Fraunhofer-Einrichtung fuer Angewandte Optik und Feinmechanik (Germany)
Stefan Gliech, Fraunhofer-Einrichtung fuer Angewandte Optik und Feinmechanik (Germany)
Karl Hehl, Friedrich-Schiller-Univ. (Germany)
Stephan Pichlmaier, Friedrich-Schiller-Univ. (Germany)
Uwe Schuhmann, JENOPTIK Technologie GmbH (Germany)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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