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Proceedings Paper

Convolution formulation of diffraction for grating system
Author(s): Alexander P. Smirnov
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Paper Abstract

The convolution method of solution of some problems in scalar diffraction for optical multicomponent systems including ones based on the Talbot or Lau effect is described. This work is a development of ideas of the diffraction theory treatment suggested by Cowlew and Hoodie. As example, the developed method has been applied to a double- grating system for which three configurations are found and investigated.

Paper Details

Date Published: 31 October 1994
PDF: 8 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994);
Show Author Affiliations
Alexander P. Smirnov, S.I. Vavilov State Optical Institute (Russia)

Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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