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Proceedings Paper

Instrument for measuring the light scattered by diffraction gratings
Author(s): Mariusz Szyjer
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Paper Abstract

The instrument for measuring the light scattered from optical surfaces is described. The measurement is carried out using the 253 nm wavelength separated from continuous spectrum of high pressure mercury lamp by a double monochromator. Output signals are detected by a photomultiplier whose sensitivity falls rapidly above 300 nm. The sensitivity of the instrument is about 0.5/3 X 10<8%, where the numbers 0.5 and 3 X 108 characterize the minimal detectable output signal and the maximal one (in reflected light).

Paper Details

Date Published: 31 October 1994
PDF: 6 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192044
Show Author Affiliations
Mariusz Szyjer, Institute of Applied Optics (Poland)


Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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