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Proceedings Paper

Rough scattering made by laser on metal and semiconductor surfaces
Author(s): Galina D. Shandybina
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Paper Abstract

Diffraction on metal and semiconductor surfaces during the process of laser irradiation is interesting for microelectronics, power optics and elements of measuring technology. We also present experimental data in changing dynamics of diffuse reflection of copper and bronze mirrors and silicon polished plates during laser irradiation. The impulse of laser radiation from neodymium glass lasts 4 ms. There could be seen the intense reversible increase of diffusion scattering and at the same time decrease of specular component of reflection during laser influence on metal and the appearance of precisely expressed unreturn scattering reflexes during irradiation of semiconductor plates long before the melting threshold. We conduct the quantitative measurements of target thermodeformation, local deformation of heterogeneities and laser induced effects of the surface with the help of the impulse two.beam interferometry method by indirect measurements of temperature in laser radiation zone. We also established the connection between the dynamic change of scattering of metal and semiconductor with the nature of deformation, such as thermo..deformation of the whole irradiation zone, local deformation of heterogeneities of the surface and defects generated by laser. A physical model of laser induced surface roughness, confirmed by mathematical calculations in the thermoelastic approach, will be also discussed.

Paper Details

Date Published: 31 October 1994
PDF: 1 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192038
Show Author Affiliations
Galina D. Shandybina, St. Petersburg Institute of Fine Mechanics & Optics (Russia)

Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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