Physical principles underlying the original noncontact optical-correlation techniques for surface diagnostics are discussed. The performance of the optical correlation devices is compared with that of the available diagnostics systems. The proposed systems for surface diagnostics are based on the relationship between the statistical parameters of the object's structure and the associated correlation parameters of the scattered optical field. The relationship is used in developing diagnostic systems based on the scintillation index, the transverse correlation function, the amplitude variance and the field phase measurements '.The advantage of the proposed systems is the high speed (1.2 seconds) operation which is achieved by performing the statistical data processingwithin the optical channeL The height parameter measurement accuracy is 25 A.

Date Published: 31 October 1994
PDF: 1 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192032

Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)