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Proceedings Paper

High-resolution IR laser spectral analysis in nondestructive onco-hematological diagnostics and semiconductor technique applications
Author(s): Sergey D. Darchuk; Larisa A. Korovina; Vladimir G. Bebeshko; Fiodor F. Sizov
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Paper Abstract

A constructed high resolution (<EQ 10-3 cm-1) laser spectrometer, based on IV-VI cryogenic injection lasers, is described in applications to early medical onco-hematological diagnostics and nondestructive control of oxygen concentration and its distribution across Si-wafers. In this kind of spectrometer the dispersive elements are absent. Scanning of the radiation wavelength is realized by changing of the injection current. The width of the spectral scanning band is determined by the value of the laser injection current and the duration of the injection current pulse. Using these kinds of spectrometers it is possible to realize not only the measurements of infrared spectra with high resolution, but also high speed of the measurements. One spectrum in the range of (Delta) (lambda) approximately equals 0.55 micrometers can be measured during 15 ms. High resolution (10-3 - 10-4 cm-1) makes it possible to resolve the superfine structure of absorption bands.

Paper Details

Date Published: 31 October 1994
PDF: 5 pages
Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); doi: 10.1117/12.192003
Show Author Affiliations
Sergey D. Darchuk, Institute of Semiconductor Physics (Ukraine)
Larisa A. Korovina, Ukraine Scientific Ctr. of Radiation Medicine (Ukraine)
Vladimir G. Bebeshko, Ukraine Scientific Ctr. of Radiation Medicine (Ukraine)
Fiodor F. Sizov, Institute of Semiconductor Physics (Ukraine)

Published in SPIE Proceedings Vol. 2113:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergei V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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