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Proceedings Paper

Laser-interference dilatometry method for the investigation of thin-film structures mechanical stability
Author(s): M. L. Trunov; A. G. Antchugin; N. D. Savtchenko; V. M. Rubish
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Paper Abstract

The perfection of vacuum technology of thin film structure production of different functional applications is to a great extent defined by the technical level of the devices for investigation of mechanical properties of thin films. Improvement of operational characteristic features of film structures is restrained by lack of mechanical stability which in its turn is considerably influenced by the level of internal macro- and microstresses. In this paper the method and device for thin films mechanical stability investigation are presented and the examples of PbF2 and As2S3 coatings are furnished.

Paper Details

Date Published: 31 October 1994
PDF: 7 pages
Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); doi: 10.1117/12.191989
Show Author Affiliations
M. L. Trunov, Uzhgorod State Univ. (Ukraine)
A. G. Antchugin, Uzhgorod State Univ. (Ukraine)
N. D. Savtchenko, Uzhgorod State Univ. (Ukraine)
V. M. Rubish, Uzhgorod State Univ. (Ukraine)

Published in SPIE Proceedings Vol. 2113:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergei V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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