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Proceedings Paper

Advanced die-to-database reticle machine for 64-Mbit DRAMs
Author(s): Yair Eran; Gideon Rossman
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Paper Abstract

This report describes the RT-8000 product line of advanced reticle inspection systems for 64 and 256 Mbit DRAMs. The description is given from the system designer point of view. The main issues that are discussed are the methodologies used in the early phase of design and the design guidelines that help to meet the marketing goals. The central subject is the system architecture and its relation to the marketing needs.

Paper Details

Date Published: 3 November 1994
PDF: 6 pages
Proc. SPIE 2254, Photomask and X-Ray Mask Technology, (3 November 1994); doi: 10.1117/12.191949
Show Author Affiliations
Yair Eran, Orbot Instruments Ltd. (Israel)
Gideon Rossman, Orbot Instruments (Japan)


Published in SPIE Proceedings Vol. 2254:
Photomask and X-Ray Mask Technology
Hideo Yoshihara, Editor(s)

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