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Proceedings Paper

Optical properties of polycrystalline -SiC membrane for x-ray mask
Author(s): Tsutomu Shoki; Yoichi Yamaguchi; Noromichi Annaka; Isao Amemiya
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Paper Abstract

Optical properties of poly-crystalline (beta) -SiC membrane deposited by LPCVD have been investigated in detail. The SiC films have a high refractive index value of 2.63 and a low extinction coefficient (k) of 0.0065 at wavelength of 633 nm. Optical transmittance increased as the SiC surface roughness decreased. Peak transmittance at 633 nm for 1.0 micrometers -thick polished SiC membrane with extremely smooth surface of 2 nm Rmax is limited to 83% due to the absorption of the membrane. The transmittance of the polished SiC membrane has increased up to 86% due to reduction in k after annealing at 1050 degree(s)C. Al2O3 film was the most suitable for the SiC film among anti-reflection (AR) materials studied. The attained transmittance values at 633 nm for the as-deposited, the polished and the annealed SiC membranes of 1.0 micrometers in thickness with Al2O3 AR films were, 83%, 88% and 91%, respectively.

Paper Details

Date Published: 3 November 1994
PDF: 7 pages
Proc. SPIE 2254, Photomask and X-Ray Mask Technology, (3 November 1994); doi: 10.1117/12.191943
Show Author Affiliations
Tsutomu Shoki, HOYA Corp. (Japan)
Yoichi Yamaguchi, HOYA Corp. (Japan)
Noromichi Annaka, HOYA Corp. (Japan)
Isao Amemiya, HOYA Corp. (Japan)

Published in SPIE Proceedings Vol. 2254:
Photomask and X-Ray Mask Technology
Hideo Yoshihara, Editor(s)

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