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Proceedings Paper

Influence of etching solution for high-Tc superconducting thin film
Author(s): Lin Kang; Ping Wu
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Paper Abstract

This paper reports a wet etching technique for the pattern of high-Tc superconducting thin film. The solutions of 3% H3PO4, saturated EDTA and saturated NH4CL are used as the etchants. The samples of YBCO high-Tc superconducting thin film are etched with the etching solutions. The measure results show that the influence of the etching solutions on Tc is related to the bridge width. The measure results for 50 micrometers , 5 micrometers , and 2 micrometers bridge widths are given and the X-T and R-T curves of the samples are provided in this paper.

Paper Details

Date Published: 26 October 1994
PDF: 4 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190815
Show Author Affiliations
Lin Kang, Nanjing Univ. (China)
Ping Wu, Nanjing Univ. of Aeronautics and Astronautics (China)

Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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