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Proceedings Paper

Analysis of the composition and microstructure in lead zirconate titanate thin films
Author(s): Jingyu Lian; Yasuyuki Yamamoto; Hiroshi Chihara; Akio Nakata
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Paper Abstract

Two nondestructive methods, X-ray Fluorescence Spectrometry (XRE) and Electron Probe Micro Analyzer (EPMA) are studied for the composition analysis in thin film. The operation conditions and parameters of these two methods are discussed. An analysis precision with the standard deviation within 0.005 for the atomic ration of Pb/(Zr + Ti) was obtained by the XRF-FP method. The transformation of perovskite ferroelectric phase from an as-deposited amorphous film prepared by the multi target co-sputtering method with a post annealing process is investigated through the local area quantitative analysis by EPMA. The annealed film with the initial atomic ratio of Pb/(Zr + Ti) < 1.13 were found to be consisted of two phases, perovskite and pyrochlore phases, with the different composition for each other. The surplus of Pb in the initial composition was found to be desirable for getting the perovskite phase through the annealing process.

Paper Details

Date Published: 26 October 1994
PDF: 7 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190795
Show Author Affiliations
Jingyu Lian, TDK Corp. (Japan)
Yasuyuki Yamamoto, TDK Corp. (Japan)
Hiroshi Chihara, TDK Corp. (Japan)
Akio Nakata, TDK Corp. (Japan)

Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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