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Proceedings Paper

Epitaxial growth of optical LiTaO3 and LiNbO3 waveguide film by pulsed-laser deposition
Author(s): Junming Liu; Zhiguo Liu; Shining Zhu; Zhuangchun Wu; Ming-Sheng Zhang; Duan Feng
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Paper Abstract

The waveguiding epitaxial LiTaO3 and LiNbO3 films have been prepared on sapphire substrates by pulsed laser deposition technique. The as-grown films were characterized by Raman scattering, XRD and SEM techniques, which revealed that epitaxial LiTaO3 and LiNbO3 films with small roughness were achieved on (001) and (012) sapphire substrates, respectively. Optical waveguiding properties were demonstrated by m-line measurement of TM and TE modes.

Paper Details

Date Published: 26 October 1994
PDF: 5 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190783
Show Author Affiliations
Junming Liu, Nanjing Univ. (China)
Zhiguo Liu, Nanjing Univ. (China)
Shining Zhu, Nanjing Univ. (China)
Zhuangchun Wu, Nanjing Univ. (China)
Ming-Sheng Zhang, Nanjing Univ. (China)
Duan Feng, Nanjing Univ. (China)

Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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