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Proceedings Paper

Ferroelectric thin films and their applications
Author(s): Wolfram Wersing; Rainer Bruchhaus
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Paper Abstract

Ferroelectric materials such as lead zirconate titanate exhibit a range of physical properties of interest for different applications in today's technique. They are characterized by high dielectric constants and a permanent, electrically switchable polarization and display strong piezoelectric, pyroelectric and electrooptic effects. In the form of thin films, ferroelectrics can be integrated with existing semiconductor technologies. This opens a variety of possibilities to improve existing devices or to design new microelectronic and micromechanical components and devices such as nonvolatile memory devices, integrated multilayer capacitors, infrared detector arrays, electrooptic switches and modulators, microactuators and motors, integrated pressure and acceleration sensors and bulk acoustic resonator devices.

Paper Details

Date Published: 26 October 1994
PDF: 9 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190727
Show Author Affiliations
Wolfram Wersing, Siemens AG (Germany)
Rainer Bruchhaus, Siemens AG (Germany)

Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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