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Proceedings Paper

Synthesis of high-quality diamond thin film on large area
Author(s): Chengru Shi; Guofeng Pang; Yan Shi
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Paper Abstract

Large area high quality diamond films have been synthesized at growth rate of 0.5 approximately equals 2 micrometers /hr by AHFCVD method. Many important improvements have been made compared with conventional HFCVD. With this technique, it is possible to produce high quality diamond films on substrate as large as 15 cm X 15 cm in size at higher growth rate.

Paper Details

Date Published: 26 October 1994
PDF: 4 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190718
Show Author Affiliations
Chengru Shi, Hangzhou Univ. (China)
Guofeng Pang, Hangzhou Univ. (China)
Yan Shi, Hangzhou Univ. (China)

Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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