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Proceedings Paper

Removal of surface contaminants using a chemical-free laser-assisted process
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Paper Abstract

Contamination control is a critical issue to the manufacture and maintenance of optical components. Particulates and thin films (organic and inorganic) can degrade optical performance. Current cleaning methods are focusing on aqueous-based cleaning and super- critical fluids. Concurrently, environmentally-conscious manufacturing processes are becoming essential for industrial applications. These manufacturing processes emphasize the reduction of water and chemical consumption and hazardous waste production. In this paper, we will introduce a chemical-free laser assisted process that has demonstrated its capability of removing particulates and films from various surfaces including optical. Since this process works with energy flux and a flowing inert gas, it's readily adaptable and cost effective for many industrial applications.

Paper Details

Date Published: 19 October 1994
PDF: 12 pages
Proc. SPIE 2261, Optical System Contamination: Effects, Measurements, and Control IV, (19 October 1994); doi: 10.1117/12.190151
Show Author Affiliations
Audrey C. Engelsberg, Radiance Services Co. (United States)

Published in SPIE Proceedings Vol. 2261:
Optical System Contamination: Effects, Measurements, and Control IV
A. Peter M. Glassford, Editor(s)

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