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Proceedings Paper

Fabrication and optical properties of multilayer epitaxial ferroelectric n X (SrTiO3/PbTiO3) thin films by the sol-gel technique
Author(s): Yudan Lou; Yuhuan Xu; John D. Mackenzie
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Paper Abstract

The sol-gel process was used to form ferroelectric epitaxial PbTiO3 and SrTiO3 thin films on single crystal SrTiO3 substrates. In this study, optically transparent multilayer n$CHI[SrTiO3/PbTiO3] thin films were grown successfully along the (001) direction on single crystal SrTiO3 substrates. Lead titanium double alkoxide and strontium titanium double alkoxide were used as precursors. The layers of transparent PbTiO3 films were obtained by heat treatment at 700 degree(s)C in PbO atmosphere, while the layers of SrTiO3 were obtained at 800 degree(s)C in air. The average thickness of each PbTiO3 or SrTiO3 layer was measured by SEM analysis. The change of optical transmittance with wavelength for a sample with 12 (6$CHI[SrTiO3/PbTiO3]) layers film was measured. The refractive index of PbTiO3 and SrTiO3 films grown on Si substrates was measured with respect to film thickness. The epitaxial growth of the PbTiO3 thin films and SrTiO3 thin films was investigated using XRD, HRTEM, and SEM analysis. The structure, growth parameters, and optical properties of the films are discussed.

Paper Details

Date Published: 13 October 1994
PDF: 10 pages
Proc. SPIE 2288, Sol-Gel Optics III, (13 October 1994); doi: 10.1117/12.188940
Show Author Affiliations
Yudan Lou, Univ. of California/Los Angeles (United States)
Yuhuan Xu, Univ. of California/Los Angeles (United States)
John D. Mackenzie, Univ. of California/Los Angeles (United States)

Published in SPIE Proceedings Vol. 2288:
Sol-Gel Optics III
John D. Mackenzie, Editor(s)

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