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Proceedings Paper

Vibration control: the rigid equipment support platform
Author(s): William Reid
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Paper Abstract

TMC has developed a practical method of rigidly supporting vibration-sensitive and heavy equipment in raised-grid cleanroom floors. The direction application has been in semiconductor fabrication and testing areas. The primary interest is to provide stable support for such equipment where elastomeric, or `spring', suspension systems are not required for actual attenuation of vibration. A system of modular support stands and rigid platform tops is described. Accelerometers and a spectrum analyzer are used to make adjustments to the stands so as to optimize uniformity of support. Dynamic analysis is therefore an intrinsic part of the `system', and allows immediate evaluation of the overall vibration condition.

Paper Details

Date Published: 4 October 1994
PDF: 7 pages
Proc. SPIE 2264, Vibration Monitoring and Control, (4 October 1994); doi: 10.1117/12.188864
Show Author Affiliations
William Reid, Technical Manufacturing Corp. (United States)

Published in SPIE Proceedings Vol. 2264:
Vibration Monitoring and Control
Colin G. Gordon, Editor(s)

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