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Proceedings Paper

Uncooled infrared focal plane array having 128 x 128 thermopile detector elements
Author(s): Toshio Kanno; Minoru Saga; Shouhei Matsumoto; Makoto Uchida; Nanao Tsukamoto; Akio Tanaka; Shigeyuki Itoh; Akihiro Nakazato; Tsutomu Endoh; Shigeru Tohyama; Yuuichi Yamamoto; Susumu Murashima; Nahoya Fujimoto; Nobukazu Teranishi
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Paper Abstract

A 128 X 128 element thermopile infrared image sensor has been developed. This device has a monolithically integrated structure to increase fill factor. The CCD for signal charge accumulation and signal charge read-out is fabricated on the silicon surface. Over the CCD, silicon dioxide diaphragms for thermal isolation are made by using micromachining technology. On each diaphragm, 32 pairs of p-type polysilicon and n-type polysilicon thermopile are formed. The noise equivalent temperature difference obtained by the device is 0.5 degree(s)C with an f/1 lens. Since the materials used are the same as those for silicon ICs, and since the whole fabrication process is carried out at the silicon IC plant, it can be said that a low cost uncooled infrared image sensor is realized by this technology.

Paper Details

Date Published: 17 October 1994
PDF: 10 pages
Proc. SPIE 2269, Infrared Technology XX, (17 October 1994); doi: 10.1117/12.188660
Show Author Affiliations
Toshio Kanno, Japan Defense Agency (Japan)
Minoru Saga, Japan Defense Agency (Japan)
Shouhei Matsumoto, NEC Corp. (Japan)
Makoto Uchida, NEC Corp. (Japan)
Nanao Tsukamoto, NEC Corp. (Japan)
Akio Tanaka, NEC Corp. (Japan)
Shigeyuki Itoh, NEC Corp. (Japan)
Akihiro Nakazato, NEC Corp. (Japan)
Tsutomu Endoh, NEC Corp. (Japan)
Shigeru Tohyama, NEC Corp. (Japan)
Yuuichi Yamamoto, NEC Corp. (Japan)
Susumu Murashima, NEC Corp. (Japan)
Nahoya Fujimoto, NEC Corp. (Japan)
Nobukazu Teranishi, NEC Corp. (Japan)

Published in SPIE Proceedings Vol. 2269:
Infrared Technology XX
Bjorn F. Andresen, Editor(s)

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