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Proceedings Paper

In-process optical metrology for aspheric surfaces
Author(s): Mauro Melozzi; Luis Pezzati; Alessandro Mazzoni
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Paper Abstract

We realized a digital interferometer for measuring the shape of optical surfaces in an unstable environment. The instrument performs good quality measurements even if it is subjected to severe mechanical vibrations. Interferograms are decoded using a spatial-carrier phase-shifting technique. The system has been mounted over a polishing machine and used for on-line testing of aspheric mirror surfaces.

Paper Details

Date Published: 30 September 1994
PDF: 6 pages
Proc. SPIE 2210, Space Optics 1994: Space Instrumentation and Spacecraft Optics, (30 September 1994); doi: 10.1117/12.188122
Show Author Affiliations
Mauro Melozzi, Officine Galileo (Italy)
Luis Pezzati, Officine Galileo (Italy)
Alessandro Mazzoni, Officine Galileo (Italy)

Published in SPIE Proceedings Vol. 2210:
Space Optics 1994: Space Instrumentation and Spacecraft Optics
Thierry M. Dewandre; Joachim J. Schulte-in-den-Baeumen; Emmanuel Sein, Editor(s)

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