A high precision mechanical profilometer (MPROS) has been designed and utilized for metrology on the Advances X-Ray Astrophysics Facility (AXAF) optic program. The instrument serves both as a measure of axial figure during the grinding phase of mirror fabrication and as the AXAF program crosscheck for axial sag error. MPROS has demonstrated an accuracy of 0.25 micrometers P-P over nominally 1 meter of travel. The design is relatively simple, employing Hewlett Packard distance measuring interferometers, an air bearing slide, and coated Zerodur reference surface. This paper will present the AXAF axial metrology requirements, MPROS design, and reference surface calibration. System performance and results will be presented and discussed.

Date Published: 30 September 1994
PDF: 10 pages
Proc. SPIE 2263, Current Developments in Optical Design and Optical Engineering IV, (30 September 1994); doi: 10.1117/12.188025

Published in SPIE Proceedings Vol. 2263:
Current Developments in Optical Design and Optical Engineering IV
Robert E. Fischer; Warren J. Smith, Editor(s)