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Proceedings Paper

Sampling considerations for semiconductor manufacture
Author(s): Scott M. Ashkenaz
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Paper Abstract

Data collection is implicit in experimentation on and control of semiconductor manufacturing processes, but is often ignored for its effect on the outcome of testing. Improper sampling can increase the cost of testing, either by testing too much, or by increasing the risk of reaching a wrong conclusion; the costs can be significantly more than the cost of measurement, in some cases approaching several million dollars. This paper reviews methods and patterns of sampling. Issues associated with the nested process characteristics of semiconductor manufacturing are discussed, with specific attention to typical distributions. Sample size effects and recommendations are reviewed. The cost of uncertainty associated with sampling is examined. The paper also includes definitions of conunonly-used statistics and tests.

Paper Details

Date Published: 1 July 1994
PDF: 16 pages
Proc. SPIE 10274, Handbook of Critical Dimension Metrology and Process Control: A Critical Review, 102740G (1 July 1994); doi: 10.1117/12.187458
Show Author Affiliations
Scott M. Ashkenaz, KLA Instruments Corp. (United States)

Published in SPIE Proceedings Vol. 10274:
Handbook of Critical Dimension Metrology and Process Control: A Critical Review
Kevin M. Monahan, Editor(s)

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