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Proceedings Paper

Process controls for the factories of the future
Author(s): Jorge Agraz-Guerena
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Paper Abstract

The information revolution has been driven by the ever increasing processing power that the microelectronics industry has produced since the invention of the integrated circuit. The 1992 National Technology Roadmap' for semiconductors projects that the industry capabilities will evolve as follows:

Paper Details

Date Published: 16 September 1994
PDF: 3 pages
Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186773
Show Author Affiliations
Jorge Agraz-Guerena, SEMATECH (United States)


Published in SPIE Proceedings Vol. 2336:
Manufacturing Process Control for Microelectronic Devices and Circuits
Anant G. Sabnis, Editor(s)

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