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Proceedings Paper

Integrated approach to yield enhancement
Author(s): Martha A. Cockerill; Neil Bryan Henis; Carrie Lundquist; Elizabeth D. Marshall; Gus Raad
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Paper Abstract

As integrate circuit geometries, capital for defect detection equipment, and process cycle time decrease simultaneously, prioritizing continuous yield improvement activities becomes essential. One approach for achieving this goal is to integrate yield enhancement resources. The resources available for integration have been failed bit map analysis, inline defect monitoring, molecular contamination detection, and failure analysis. The analytical systems chosen to support these activities have included a scanning electron microscope (JEOL 840FE), an energy dispersive x-ray system (EDAX), a focused ion beam mill (Micrion), a secondary ion mass spectrometer (Cameca IMS3F) -- as well as inspection systems equipped with laser based scanning for pattern anomalies and surface contamination (Tencor Surfscan 7XXX). Combining these techniques and tools facilitates efficient manufacturing process partitioning and root cause analysis leading to continuous improvement.

Paper Details

Date Published: 14 September 1994
PDF: 7 pages
Proc. SPIE 2334, Microelectronics Manufacturability, Yield, and Reliability, (14 September 1994); doi: 10.1117/12.186756
Show Author Affiliations
Martha A. Cockerill, Motorola (United States)
Neil Bryan Henis, Motorola (United States)
Carrie Lundquist, Motorola (United States)
Elizabeth D. Marshall, Motorola (United States)
Gus Raad, Motorola (United States)

Published in SPIE Proceedings Vol. 2334:
Microelectronics Manufacturability, Yield, and Reliability
Barbara Vasquez; Hisao Kawasaki, Editor(s)

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