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Proceedings Paper

Fabrication of two-dimensional rough surfaces for light scattering and polarization measurements
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Paper Abstract

The fabrication of characterized rough surfaces on photoresist is described. The technique used here can be separated into tow parts: first, a photoresist coating, generally 5 to 15 microns thick, is deposited on a flat glass substrate and baked in an oven; second, the plate is exposed, one line at a time, by a laser beam in a raster scanning method. Plate displacement is controlled by a PC computer in order to create the desired structure on the photoresist. Several deterministic and randomly rough gratings have been fabricated and characterized with a stylus profilometer.

Paper Details

Date Published: 14 September 1994
PDF: 6 pages
Proc. SPIE 2265, Polarization Analysis and Measurement II, (14 September 1994); doi: 10.1117/12.186657
Show Author Affiliations
Michel A. Josse, CEA/CESTA (France)
Zu-Han Gu, Surface Optics Corp. (United States)

Published in SPIE Proceedings Vol. 2265:
Polarization Analysis and Measurement II
Dennis H. Goldstein; David B. Chenault, Editor(s)

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