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Proceedings Paper

Evaluation of coating deposition geometries for annular resonator optics
Author(s): Robert A. Field
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Paper Abstract

A mathematical model was constructed in order to evaluate line of sight thin film deposition geometries for uncooled annular resonator optics that have very low absorption high reflectance coatings. Model inputs include thin film source distribution profiles, source offset location and orientation, substrate surface profile and dimensions, substrate height and rotation, and radially varying masks if required. The model calculates the uniformity of the resulting films as well as other parameters that affect film quality such as deposition angles and relative deposition rates. This paper presents the results of the analysis for the Alpha laser beam compactor and rear cone. The use of tilted deposition sources promises to improve film quality, uniformity, and producibility. The model is readily revised to include additional constraints of concern to vendors and end-users. A mask concept is proposed to minimize film quality degradation due to intermittency effects.

Paper Details

Date Published: 7 September 1994
PDF: 12 pages
Proc. SPIE 2262, Optical Thin Films IV: New Developments, (7 September 1994); doi: 10.1117/12.185790
Show Author Affiliations
Robert A. Field, W.J. Schafer Associates, Inc. (United States)

Published in SPIE Proceedings Vol. 2262:
Optical Thin Films IV: New Developments
James D. Rancourt, Editor(s)

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