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Proceedings Paper

Microstructural and optical characteristics of waveguiding piezoelectric zinc oxide films
Author(s): V. M. Shevtsov; A. Y. Agapov; P. M. Zhitkov
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Paper Abstract

Optical and microstructural characteristics of polycrystalline waveguiding ZnO films deposited by RF reactive sputtering has been investigated. The origin of high waveguiding mode propagation losses and spatial inhomogeneity of the sputtered films has been investigated experimentally. A technique allowing to avoid these disadvantages has been proposed. Using this technique free of mechanical stress highly oriented textured ZnO waveguiding films with optical propagation loss less than 1 dB/cm have been deposited.

Paper Details

Date Published: 25 August 1994
PDF: 9 pages
Proc. SPIE 2212, Linear and Nonlinear Integrated Optics, (25 August 1994); doi: 10.1117/12.185162
Show Author Affiliations
V. M. Shevtsov, Russian People's Friendship Univ. (Russia)
A. Y. Agapov, Russian People's Friendship Univ. (Russia)
P. M. Zhitkov, Russian People's Friendship Univ. (Russia)


Published in SPIE Proceedings Vol. 2212:
Linear and Nonlinear Integrated Optics
Giancarlo C. Righini; David Yevick, Editor(s)

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