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Proceedings Paper

Excimer laser processing of metals considering the effects of pulse duration and geometrical aspects
Author(s): Rolf Buetje
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Paper Abstract

In the field of material processing excimer lasers are well suited for removal processes of polymeric materials using photochemical ablation mechanism; Pulse characteristics in combination with short wavelengths of this laser type enable high quality processing for micromachining of various metals as well. Therefore excimer lasers can become a competitor to other micromachning techniques (e.g. wet etching or galvanoforming). The removal process at metals itself is distinctly determined by process parameters as intensity, pulse quantity, pulse duration and geometrical shape/size (wavelength influences are not important), where in general only intensity and pulse quantity are controllable. Despite this, pulse duration and geometrical aspects have an essential influence on the process and should be regarded to achieve the aimed process quality. The object of this paper is to work out the removal process of metals with excimer laser radiation, concerning the influence of pulse duration and geometrical aspects described above. Nevertheless the application is limited technologically and economically to a material thickness of much less than one millimeter, since removal rates per pulse are given in the range of one to a fraction of a micron. This paper shows the capability of excimer lasers for applications in the field of drilling and cutting.

Paper Details

Date Published: 1 June 1990
PDF: 9 pages
Proc. SPIE 1225, High-Power Gas Lasers, (1 June 1990); doi: 10.1117/12.18487
Show Author Affiliations
Rolf Buetje, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 1225:
High-Power Gas Lasers
Petras V. Avizonis; Charles Freed; Jin J. Kim; Frank K. Tittel, Editor(s)

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