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Proceedings Paper

Machining of diffractive optics: a novel application for excimer laser?
Author(s): C. Stauter; Thierry Engel; Joel Fontaine; Alain P. Biernaux
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Paper Abstract

There is a variety of techniques which can be used in the fabrication of diffractive elements. However, none of them is completely satisfactory due to lack of resolution, high costs or duration of process. On the other hand, high power excimer lasers have been shown to be effective in micromachining of surfaces with high accuracy. In the following we discuss the possible use of excimer laser beam to fabricate diffractive elements. We show that a resolution, high enough to diffract light with high efficiency in the visible is not possible. For longer wavelengths, specially the widely used 10.6 micrometers of CO2 lasers, the grooves that can be made, are satisfactory in the case of materials like Zinc Selenide or Zinc Sulfide used for making lenses and coatings but not in the case of reflective materials like Copper and Molybdenum.

Paper Details

Date Published: 7 September 1994
PDF: 10 pages
Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184776
Show Author Affiliations
C. Stauter, ENSAIS (France)
Thierry Engel, ENSAIS (France)
Joel Fontaine, ENSAIS (France)
Alain P. Biernaux, Irepa-Laser (France)

Published in SPIE Proceedings Vol. 2207:
Laser Materials Processing: Industrial and Microelectronics Applications
Eckhard Beyer; Maichi Cantello; Aldo V. La Rocca; Lucien Diego Laude; Flemming O. Olsen; Gerd Sepold, Editor(s)

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