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Proceedings Paper

Direct synthesis of metal nitride by CO2 or XeCl laser-plasma
Author(s): Chantal Boulmer-Leborgne; A. L. Thomann; Joerg Hermann
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Paper Abstract

The present work deals with a new nitriding method applied to titanium: the Ti surface nitriding is carried out by direct laser irradiation in the presence of ambient nitrogen. The experimental procedure is performed in a chamber containing N2 gas, allowing plasma study by emission spectroscopy. Two pulsed laser types are used, a TEA-CO2 ((lambda) equals 10.6 micrometers ) and a XeCl excimer ((lambda) equals 308 nm) in order to compare the laser- material coupling influence on the layer synthesis process. The laser beam is focused perpendicularly to the Ti samples. Different experimental conditions are achieved to investigate the influence of laser and gas parameters on the process. Using the CO2 laser, a N2 plasma is created on the Ti surface. With the XeCl excimer laser, a Ti plasma on the sample appears. After treatment, the surface state of the samples is studied and chemical analysis of the targets are carried out. The TiN synthesis is evidenced. Presence of oxinitride in the compound and native surface oxygen reduction by hydrogen plasma are examined.

Paper Details

Date Published: 7 September 1994
PDF: 12 pages
Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184757
Show Author Affiliations
Chantal Boulmer-Leborgne, Univ. d'Orleans (France)
A. L. Thomann, Univ. d'Orleans (France)
Joerg Hermann, Univ. d'Orleans (France)

Published in SPIE Proceedings Vol. 2207:
Laser Materials Processing: Industrial and Microelectronics Applications
Eckhard Beyer; Maichi Cantello; Aldo V. La Rocca; Lucien Diego Laude; Flemming O. Olsen; Gerd Sepold, Editor(s)

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