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Proceedings Paper

Solid state laser reliability, producibility, and maintenance issues for x-ray lithography applications
Author(s): Joseph A. Abate
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Paper Abstract

Laser-design and manufacturing considerations encountered in a micro-lithography application for a solid-state laser system are considered. A solid-state laser utilized in the application incorporates a zig-zag slab laser amplifier in a master oscillator/power amplifier staging configuration that can meet specifications for reliability and performance required for the semiconductor manufacturing industry. The laser staging makes extensive use of anamorphic beam-shaping and image-relaying to extract energy from the slab amplifier efficiently. The mechanical design of the laser structure employs multiple angularly multiplexed beams through a single-slab amplifier in order to minimize the total system volume. Relay spatial filters and maintenance issues are reviewed.

Paper Details

Date Published: 1 April 1990
PDF: 10 pages
Proc. SPIE 1223, Solid State Lasers, (1 April 1990); doi: 10.1117/12.18391
Show Author Affiliations
Joseph A. Abate, Hampshire Instruments, Inc. (United States)

Published in SPIE Proceedings Vol. 1223:
Solid State Lasers
George Dube, Editor(s)

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