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Proceedings Paper

Nanolithography and atomic manipulation on silicon surfaces by STM
Author(s): Francois Grey; A. Kobayashi; H. Uchida; D. H. Huang; M. Aono
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Paper Details

Date Published: 3 October 1993
PDF: 26 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031006 (3 October 1993); doi: 10.1117/12.183197
Show Author Affiliations
Francois Grey, ERATA (Japan)
A. Kobayashi, ERATO (Japan)
H. Uchida, Aono Atomcraft Project (Japan)
D. H. Huang, Aono Atomcraft Project (Japan)
M. Aono, Aono Atomcraft Project (Japan)

Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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