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Proceedings Paper

Role of scanning probe microscopes in the development of nanoelectric devices
Author(s): Arunava Majumdar; Stuart M. Lindsay
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Paper Details

Date Published: 3 October 1993
PDF: 25 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031004 (3 October 1993); doi: 10.1117/12.183195
Show Author Affiliations
Arunava Majumdar, Arizona State Univ. (United States)
Stuart M. Lindsay, Arizona State Univ. (United States)

Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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